分子篩吸附泵molecularsieveadsorptionpump分離因數(shù)separationfactor止回閥checkvalve水蒸汽噴射真空泵steamejectionvacuumpump水輪泵turbine-pump水錘泵hydraulicrampump半導(dǎo)體制冷器thermalelectricalrefrigerator外壓容器externalpressurevessel石墨換熱器graphiteheatexchanger安全閥safetyvalve自由活塞壓縮機(jī)free-pistoncompressor低溫泵cryopump低溫壓力容器lowtemperaturepressurevessel吸收式制冷機(jī)absorptionrefrigeratingmachine吸氣劑離子泵getterionpump夾管閥pinchvalve沉降離心機(jī)sedimentationcentrifuge刮面式換熱器scrapedsurfaceheatexchanger往復(fù)活塞壓縮機(jī)reciprocating-pistoncompressor往復(fù)真空泵pistonvacuumpump板式換熱器plateheatexchanger板翅式換熱器plate-finheatexchanger板殼式換熱器lamellaheatexchanger波紋管閥bellowsvalve油擴(kuò)散泵oildiffusionpump油擴(kuò)散噴射泵oildiffusionejectorpump空氣分離設(shè)備airseparationplant空氣冷卻器aircooledheatexchanger空氣調(diào)節(jié)設(shè)備air-conditioningequipment室式分離機(jī)multi-chamberseparator柱塞泵plungerpump氟塑料換熱器flexible-tubeheatexchanger活塞泵pistonpump玻璃換熱器glassheatexchanger計量泵meteringpump套管式換熱器double-pipeheatexchanger射流泵jetpump氣體分離設(shè)備gasseparationplant氣體液化設(shè)備gasliquifactionplant浮球調(diào)節(jié)閥floatadjustingvalve真空檢漏vacuumleakdetection?熱式氣體制冷機(jī)regeneratorgasrefrigerator高溫壓力容器hightemperaturepressurevessel動態(tài)過濾機(jī)dynamicfilter帶式真空過濾機(jī)beltfilter排空氣閥airvalve斜流通風(fēng)機(jī)mixed-flowfan旋片真空泵sliding-vanerotaryvacuumpump旋渦泵regeneratingpump旋塞閥plugvalve液環(huán)真空泵liquidringvacuumpump液環(huán)壓縮機(jī)liquidringcompressor混合式換熱器mixingheatexchanger深低溫液化氣體貯槽cryogenicstoragevessel深低溫精餾塔cryogenicrectificationcolumn球形壓力容器sphericalpressurevessel球閥ballvalve疏水閥steamtrapvalve蛇管式換熱器serpentinetypeheatexchanger傘板換熱器umbrellatypeplateheatexchanger